To provide a physical quantity sensor element and a physical quantity sensor which have excellent detection accuracy, and electronic equipment provided with the physical quantity sensor.

In a physical quantity sensor element 1 which includes a base portion 31, a beam portion 34 which extends in a Y-axis direction from the base portion 31 and has a plate surface with a Z-axis direction as a normal line, a mass portion 35 provided in the tip portion of the beam portion 34, and a detection element 42 which is formed by stacking a first electrode layer 421, a piezoelectric layer 422 and a second electrode layer 423 on the plate face of the beam portion 34 in this order and detects bending deformation in the Z-axis direction of the beam portion 34, the beam portion 34 has such a shape that its width is gradually reduced from the base end side to the tip portion side when viewed from the Z-axis direction.