Title:
物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体
Document Type and Number:
Japanese Patent JP7098904
Kind Code:
B2
Abstract:
A physical quantity sensor includes a substrate, a movable body that includes a movable drive electrode, a movable detection electrode, and a connection portion for connecting the movable drive electrode and the movable detection electrode and is allowed to vibrate along a first axis with respect to the substrate, a fixed drive electrode that is fixed to the substrate, is disposed to face the movable drive electrode, and vibrates the movable body along the first axis, and a fixed monitor electrode that is fixed to the substrate, is disposed to face the movable detection electrode and detects vibration of the movable body along the first axis.
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Inventors:
Kazuyuki Nagata
Makoto Furuhata
Kikuchi Takayuki
Makoto Furuhata
Kikuchi Takayuki
Application Number:
JP2017190931A
Publication Date:
July 12, 2022
Filing Date:
September 29, 2017
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01C19/5747; H01L29/84
Domestic Patent References:
| JP200097708A | ||||
| JP2002340561A | ||||
| JP2004163376A | ||||
| JP2013217650A | ||||
| JP200876153A | ||||
| JP11257965A |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi
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