Title:
PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2014192539
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric device, which is capable of achieving stabilization by preventing oxidation of a metal electrode formed on a crystal plate and is capable of improving environmental resistance performance of a product, and to provide a manufacturing method of the piezoelectric device.SOLUTION: Provided are a piezoelectric device, in which metal electrodes 5a and 5b are formed on a crystal piece 4 mounted on a substrate 1, and a method of manufacturing the piezoelectric device. With the method, first metal films 6a and 6b, whose antioxidation performance is more excellent than that of the metal electrodes 5a and 5b, are formed on the crystal piece 4, the metal electrodes 5a and 5b are formed on the first metal films 6a and 6b, and second metal films 7a and 7b, whose antioxidation performance is more excellent than that of the metal electrodes 5a and 5b, are formed on the metal electrodes 5a and 5b, thus sandwiching the metal electrodes 5a and 5b between the first and second metal films 6a, 6b, 7a, and 7b. Then, the second metal films 7a and 7b are oxidized through heat treatment.
More Like This:
| JPS5263049 | MULTIPLE MODE PIEZOOELECTRIC VIBRATOR |
| JP2009044753 | PIEZOELECTRIC OSCILLATOR |
| JPS58123218 | CRYSTAL OSCILLATOR |
Inventors:
YAMAMOTO TAIJI
SATO SEIJI
HIRANO NOBUHIRO
SATO SEIJI
HIRANO NOBUHIRO
Application Number:
JP2013063509A
Publication Date:
October 06, 2014
Filing Date:
March 26, 2013
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO
International Classes:
H03H9/19; H03H3/02
Attorney, Agent or Firm:
Nobuhiro Funatsu