To provide a piezoelectric device which has stable vibration characteristics and high reliability by making a molten sealing material easier to wet an inner wall surface of a sealing hole to spread and suppressing wetting and spreading to an undesired part when the sealing material is molten to seal the sealing hole.
A crystal oscillator is formed by joining a lid substrate and a base substrate so that an opening portion T1 linking a top and a reverse side of a vibration piece substrate is closed therewith. In the sealing hole 40 of the lid substrate, the cross-section of the sealing hole 40 is in a two-stage tapered shape comprising an intermediate portion as a bent portion when an inner wall portion thereof is considered to comprise an external side inner wall portion 41 from an external side to an intermediate portion of the lid substrate and an internal space side inner wall portion 42 from the intermediate portion to an internal space side opening portion 42b, an angle inside the sealing hole 40 in the angle between the external side inner wall portion 41 and internal space side inner wall portion 42 being larger than 180°. A metal film 43 is formed at the external side inner wall portion 41.
COPYRIGHT: (C)2010,JPO&INPIT
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Osamu Suzawa
Kazuhiko Miyasaka
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