Title:
PIEZOELECTRIC DEVICE AND PROCESS OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2015061092
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric device, excellent in vibration properties, capable of reducing cost by being produced by wafer level, and to provide a process of manufacturing the same.SOLUTION: The piezoelectric device includes: a piezoelectric vibration piece 110 having a vibration part 110b whose thickness is thinner compared to a peripheral part 110a; an intermediate films 120, 130 that is connected to the peripheral part 110a by being separated from the vibration part 110b on a front surface and a rear surface of the piezoelectric vibration piece 110; and encapsulation films 140, 150 that are laminated on the intermediate films 120, 130.
Inventors:
GEN KANTO
Application Number:
JP2013191460A
Publication Date:
March 30, 2015
Filing Date:
September 17, 2013
Export Citation:
Assignee:
NIHON DEMPA KOGYO CO
International Classes:
H03H9/02; H03H3/02; H03H9/17
Domestic Patent References:
| JP2011195421A | 2011-10-06 | |||
| JP2006254210A | 2006-09-21 | |||
| JPS6441309A | 1989-02-13 | |||
| JP2005057329A | 2005-03-03 | |||
| JP2010263530A | 2010-11-18 | |||
| JP2010245829A | 2010-10-28 | |||
| JP2000069594A | 2000-03-03 |
Attorney, Agent or Firm:
Tomihiko Isono
West Kazuya
West Kazuya