Title:
PIEZOELECTRIC DEVICE, LIQUID INJECTION HEAD, AND LIQUID INJECTION APPARATUS
Document Type and Number:
Japanese Patent JP2022012609
Kind Code:
A
Abstract:
To provide a piezoelectric device, a liquid injection head, and a liquid injection apparatus that can prevent destruction of a piezoelectric actuator.SOLUTION: A piezoelectric device comprises: a substrate 10 in which a plurality of concave parts 12 are formed; a diaphragm 50; and a piezoelectric actuator 300 that includes a first electrode 60, a piezoelectric layer 70, and a second electrode 80. The piezoelectric actuator 300 has a plurality of active parts 310. Any one electrode of the first electrode 60 and the second electrode 70 forms individual electrodes of the active parts 310. The other electrode forms a common electrode of the active parts 310. The first electrode 60 and the second electrode 80 are electrically connected with a drive circuit 120 having a switching element that drives the piezoelectric actuator 300. In a longitudinal direction Y of the concave parts 12, the piezoelectric layer 70 is extended to the outside of the concave parts 12. In the longitudinal direction Y of the concave parts 12, at least one end of the common electrode is present in the concave parts 12.SELECTED DRAWING: Figure 5
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Inventors:
YAZAKI SHIRO
Application Number:
JP2020114558A
Publication Date:
January 17, 2022
Filing Date:
July 02, 2020
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L41/047; B41J2/14; B41J2/16; H01L41/053; H01L41/09
Attorney, Agent or Firm:
Hiroyuki Kurihara
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