Title:
圧電ガスポンプ
Document Type and Number:
Japanese Patent JP6952400
Kind Code:
B2
Abstract:
This piezoelectric pump comprises a first casing (1) that includes a diaphragm (11) having a first opening part (111), a thin plate part (12) provided to a position of facing the diaphragm (11), and a frame body (13) connecting the diaphragm (11) and the thin plate part (12), and that has an internal space serving as a pump chamber. The piezoelectric pump also comprises a piezoelectric element (2) that has a through-hole (21) having an opening larger than the first opening part (111), and that is attached to the diaphragm (11) so that the first opening part (111) is positioned on the inner side of the through-hole (21) when seen from a direction perpendicular to the diaphragm (11). The piezoelectric pump also comprises an outer wall (3) that has discharge port (31) in a position near the first opening part (111), and that is provided so as to cover at least the diaphragm (11) and so that there is a fluid passage (4) between the outer wall (3) and the diaphragm (11).
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Inventors:
Tetsuya Shimoda
Application Number:
JP2020519855A
Publication Date:
October 20, 2021
Filing Date:
May 14, 2019
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
F04B45/047
Domestic Patent References:
| JP2018040355A |
Foreign References:
| WO2011040320A1 | ||||
| WO2008069266A1 | ||||
| WO2016181833A1 |
Attorney, Agent or Firm:
Sakai International Patent Office