Title:
圧電ポンプ
Document Type and Number:
Japanese Patent JP5029692
Kind Code:
B2
Abstract:
Warping of a piezoelectric layer is eliminated, and even if a tensile stress is applied to the piezoelectric layer due to vibration, a risk that the piezoelectric layer will break is reduced. A piezoelectric pump (100) includes a piezoelectric element (54), an intermediate plate (53), and a vibrating plate (51). The piezoelectric element (54) has a flat-plate-like shape. The intermediate plate (53) is bonded to a principal surface of the piezoelectric element (54) and applies a residual stress in a compressive direction to the piezoelectric element (54). The vibrating plate (51) is bonded to the intermediate plate (53) such that the vibrating plate (51) faces a principal surface of the piezoelectric element (54) and receives a residual stress in a compressive direction from the intermediate plate (53). In addition, the vibrating plate (51) forms a portion of a wall surface of a pump chamber (41) having an open hole (31). A fluid passage is formed in the piezoelectric pump (100). The fluid passage communicates with the outside of the chamber at one end thereof, and communicates with the pump chamber (41) through the open hole (31) at the other end.
Inventors:
Atsuhiko Hirata
Kamiyadake
Kamiyadake
Application Number:
JP2009519732A
Publication Date:
September 19, 2012
Filing Date:
October 16, 2008
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/04
Domestic Patent References:
| JP2006100622A | 2006-04-13 |
Attorney, Agent or Firm:
Kaede International Patent Office