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Title:
PIEZOELECTRIC RESONATOR DEVICE AND METHOD OF MANUFACTURING SAME
Document Type and Number:
Japanese Patent JP2007274104
Kind Code:
A
Abstract:

To provide a piezoelectric resonator device which copes with ultra-compactness and an ultra-low height and the hermetic seal performance of which is enhanced.

A step difference part 101 is formed inside a package 1 with a dam part is formed, and electrode pads 12, 13 are formed on the upper side of the part 101. A crystal resonator plate 2 formed with an exciting electrode is electro-mechanically joined with on the electrode pads 12, 13 by a conductive joining member S. A lid 3 for hermetically sealing the package comprises a flat metallic plate, and the shape of its plane view is nearly similarly configured with the shape of the plane view of the package. Covar is used, for example, for the mother member of the lid 3. The surface of the covar is formed of a nickel layer. Further, a metallic minute particle paste joining member 31 is formed at the joining part of the lid with the dam of the package, and the lid and the package are joined.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
ARIMURA HIROYUKI
Application Number:
JP2006094502A
Publication Date:
October 18, 2007
Filing Date:
March 30, 2006
Export Citation:
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Assignee:
DAISHINKU CORP
International Classes:
H03H9/02; H01L23/02; H03H3/02; H03H9/10
Domestic Patent References:
JP2005317793A2005-11-10
JP2002299833A2002-10-11
JPH11274892A1999-10-08
JP2003158211A2003-05-30
JP2004327908A2004-11-18