To reduce the occurrence of gas by reducing irradiation of a laser beam for a frequency, after sealing.
A part of a first metal film forming region 56 is removed by a laser beam. A piezoelectric vibrating piece 10, having the first metal film forming region 56 partly removed is disposed so as to have a vibration arm 14, that extends from a base part 12 toward a frame wall part 64 and is fixed to a bottom 62. A cover is jointed to the frame wall part 64 by seam jointing, and an opening of a package 60, to which the piezoelectric vibrating piece 10 is fixed, is closed by a cover 100. Thereafter, the position of a recognition mark 55 is recognized through a light-transmissive member 114 for removing a part of a second metal film forming region 58 by a laser beam. When the cover 100 closes the opening of the package 60, the light-transmissive member 114 is disposed off a junction part of the cover 100, to the frame wall part 64 so as to overlap the second metal film forming region 58 and the recognition mark 55 so as to avoid overlapping the first metal film forming region 56.
HARA AKITOSHI
ISHIKAWA KAZUO
Mitsue Obuchi
Misa Nagata