Title:
PIRANI VACUUM GAUGE
Document Type and Number:
Japanese Patent JPH04147028
Kind Code:
A
Abstract:
PURPOSE:To enable degree of vacuum to be measured accurately by providing a jacket for covering an outside of a gauge main body which is exposed from a vacuum container and a piping which supplies constant-temperature water to the jacket. CONSTITUTION:A jacket 4 which covers an outside of a gauge main body 3 and whose inside is a cavity and pipes 5 and 6 which supply a constant- temperature water to the jacket 4 are provided at a Pirani vacuum sensor. This configuration allows ambient temperature of the gauge main body 3 to be constant (25 deg.C) for example and the degree of vacuum to be measured constantly stably and accurately.
Inventors:
SANADA KENICHI
Application Number:
JP27175990A
Publication Date:
May 20, 1992
Filing Date:
October 09, 1990
Export Citation:
Assignee:
NEC YAMAGATA LTD
International Classes:
G01L21/12; (IPC1-7): G01L21/12
Attorney, Agent or Firm:
Uchihara Shin
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