Title:
平面検査装置、及び平面検査方法
Document Type and Number:
Japanese Patent JP7311686
Kind Code:
B2
Abstract:
To provide a plane inspection device, etc. with which it is possible to correct a deviation in height level of a test object on the basis of the measurement result of a liquid level.SOLUTION: The present invention comprises a plurality of liquid level tools, a flow path pipe, and a correction device for correcting a deviation in height level of a test object on the basis of the detection result of a liquid level sensor. With a fluid circulating between level measurement containers through the flow path pipe, each of liquid levels obtained by the liquid level sensor when each liquid level tool is placed on a horizontal reference plane is defined as a reference level, and measurement is taken of a deviation in liquid level of each level measurement container with respect to the reference level, which is caused to occur by circulation of the fluid when the plurality of liquid level tools are installed at different top face positions of the test object. With the correction device, the liquid level of each level measurement container is controlled so as to approach the reference level, respectively, while a liquid level tool closest to the reference level is fixed in position not to move, and a deviation in height level of the test object is corrected.SELECTED DRAWING: Figure 1
Inventors:
Kenzo Miyamori
Application Number:
JP2022113596A
Publication Date:
July 19, 2023
Filing Date:
July 15, 2022
Export Citation:
Assignee:
Fujikura Composite Co., Ltd.
International Classes:
G01C5/04
Domestic Patent References:
| JP2128076A | ||||
| JP2140367A | ||||
| JP9310500A | ||||
| JP2000128490A | ||||
| JP3102096A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Masayuki Amada
Miwa Masayoshi
Masayuki Amada
Miwa Masayoshi