PLANE TYPE PROBE, PROBE ARRAY AND ITS MANUFACTURING METHOD

Title:

PLANE TYPE PROBE, PROBE ARRAY AND ITS MANUFACTURING METHOD

Document Type and Number:

Japanese Patent JP3892384

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a plane type probe having a precisely-controlled tip aperture diameter.
SOLUTION: This probe has a translucent substrate, cone-shaped projections formed on the translucent substrate and comprising the same material as the translucent substrate, and a shielding film having at least a main thickness part formed by plating on a part excluding the projection tips.

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Inventors:

Takayuki Yamaguchi

Application Number:

JP2002303706A

Publication Date:

March 14, 2007

Filing Date:

October 18, 2002

Export Citation:

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Assignee:

株式会社リコー

International Classes:

G01Q60/22; G01Q70/06; G01Q80/00; G11B7/135; G11B7/22; (IPC1-7): G01N13/14; G11B7/135; G11B7/22; G12B21/06

Domestic Patent References:

JP2000182264A
JP2002175643A
JP2000293888A
JP10082792A
JP8262038A
JP2002221478A
JP2000199737A
JP2002174587A
JP2000065713A
JP2002071545A

Attorney, Agent or Firm:

Masaharu Uemoto

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