Title:
Plasma CVD device
Document Type and Number:
Japanese Patent JP5985338
Kind Code:
B2
Inventors:
Yuji Kano
Yuji Watanabe
Yuji Watanabe
Application Number:
JP2012216135A
Publication Date:
September 06, 2016
Filing Date:
September 28, 2012
Export Citation:
Assignee:
Kojima Industries Corporation
International Classes:
C23C16/513; H05H1/46
Domestic Patent References:
JP2002093823A | ||||
JP2308534A | ||||
JP2000178744A | ||||
JP2248397A | ||||
JP7029827A | ||||
JP2003519908A |
Attorney, Agent or Firm:
Michio Nakajima
Masahiro Nakashima
Masahiro Nakashima
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