Title:
PLASMA GENERATING DEVICE
Document Type and Number:
Japanese Patent JP3566327
Kind Code:
B2
Abstract:
PURPOSE: To uniformly erode a target according to the rules or uniformly by a compact device, in a magnetic field supporting plasma generating device, by moving the loop of plasma toward magnetron discharge to be diffused in the longitudinal direction.
CONSTITUTION: For example, the inside of a primary frame-shaped magnetic pole generating device 11 is provided with two permanent magnet structures 13 and 14 rotatable aroung the longitudinal axes thereof. Then, as for the arranging manner of the magnets, the magnets shall be allowed to generate tunnel-like magnetic fields. For this purpose, the permanent magnets 13 and 14 made a pair are sufficiently kept apart toward a magnetic pole board for closing the flow 12 of the magnetic field on the side of the back face. In this way, at least one tunnel foot pole can be displaced in the longitudinal direction toward the tunnel axis in the horizontal direction, and the purpose can be attained.
Inventors:
Pius Gruenenfeldel
Application Number:
JP31336993A
Publication Date:
September 15, 2004
Filing Date:
December 14, 1993
Export Citation:
Assignee:
Unaxis Balzers Akchen Gesell Shaft
International Classes:
C23C14/35; H01J37/34; (IPC1-7): C23C14/35; H01J37/34
Domestic Patent References:
| JP3104864A | ||||
| JP3229867A | ||||
| JP3294477A | ||||
| JP4346662A | ||||
| JP4350162A | ||||
| JP4371575A | ||||
| JP5148639A | ||||
| JP5148642A | ||||
| JP57190320A |
Attorney, Agent or Firm:
Shoichi Ui
Takashi Ishida
Kenzo Hiraiwa
Toshio Toda
Masaya Nishiyama
Takashi Ishida
Kenzo Hiraiwa
Toshio Toda
Masaya Nishiyama