Title:
プラズマ生成装置、プラズマ生成方法およびプラズマ処理方法
Document Type and Number:
Japanese Patent JP6554055
Kind Code:
B2
Inventors:
Nobuhiko Takano
Mitsuru Iwata
Mitsuru Iwata
Application Number:
JP2016056645A
Publication Date:
July 31, 2019
Filing Date:
March 22, 2016
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
H05H1/46; C23C16/509; H01L21/3065
Domestic Patent References:
| JP58145100A | ||||
| JP2007067441A | ||||
| JP64016277A | ||||
| JP11087271A | ||||
| JP2006040810A | ||||
| JP2009231692A | ||||
| JP2007266231A |
Foreign References:
| US20130134877 |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Hideaki Ito
Fumio Mitsuhashi
Haruko Sanwa
Hideaki Ito
Fumio Mitsuhashi