PLASMA GENERATOR AND PLASMA PROCESSING APPARATUS

Title:

PLASMA GENERATOR AND PLASMA PROCESSING APPARATUS

Document Type and Number:

Japanese Patent JP2010123811

Kind Code:

A

Abstract:

To provide a plasma processing apparatus and a plasma generator which secure the uniformity of processing by acquiring field strength distribution of axial symmetry while preventing a mode jump.

In a processing chamber 1 which makes the interior into a vacuum, there are provided: a window part 3 for introducing microwave; and a placing part 2 for placing an object S to be processed so as to connect a gas introducing guide 11 and an exhaust passage 12. Further, there are provided: a mode converter 5 for supplying microwave of TM mode to the window part 3; and a circular wave guide 6. In the window part 3, a plurality of concentric irregularities 3a are formed in the surface of the side of the interior of the processing chamber 1.

Inventors:

SHIMATANI KOHEI

Application Number:

JP2008297325A

Publication Date:

June 03, 2010

Filing Date:

November 20, 2008

Export Citation:

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Assignee:

SHIBAURA MECHATRONICS CORP

International Classes:

H01L21/3065; H01L21/304

Attorney, Agent or Firm:

Kiuchi Mitsuharu

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