Title:
PLASMA MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH07263179
Kind Code:
A
Abstract:
PURPOSE: To provide a plasma measuring device capable of obtaining measurement results corresponding to different spectra.
CONSTITUTION: An angle of reflection is varied by a spectrum of emitted light of diffraction grating 27 where emitted light from electrons, ions, or neutral particles of plasma 22 within a vacuum container 21 is incident. By utilizing this property, a CCD camera 31 is arranged in a position fit to an angle of reflection of an objective emitted light spectrum through a lens 28, a spatial filter 29, and a lens 30.
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Inventors:
ABE TAKAO
SHIYOUJI TATSUO
SHIYOUJI TATSUO
Application Number:
JP5159394A
Publication Date:
October 13, 1995
Filing Date:
March 23, 1994
Export Citation:
Assignee:
MITSUBISHI HEAVY IND LTD
SHIYOUJI TATSUO
SHIYOUJI TATSUO
International Classes:
H05H1/00; (IPC1-7): H05H1/00
Attorney, Agent or Firm:
Takehiko Suzue
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