Title:
プラズマ処理装置及びプラズマ処理方法
Document Type and Number:
Japanese Patent JP4558365
Kind Code:
B2
Inventors:
Takashi Kobosato
Kazushi Hayashi
Kugimiya Toshihiro
Nobutaka Aomine
Kazushi Hayashi
Kugimiya Toshihiro
Nobutaka Aomine
Application Number:
JP2004092950A
Publication Date:
October 06, 2010
Filing Date:
March 26, 2004
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
Asahi Glass Co., Ltd.
Asahi Glass Co., Ltd.
International Classes:
C23C16/509; H05H1/24; H01L21/31; H05H1/46
Domestic Patent References:
| JP9104985A | ||||
| JP2004096066A |
Attorney, Agent or Firm:
Etsushi Kotani
Kyuichi Ueki
Muramatsu Toshiro
Masataka Otani
Kyuichi Ueki
Muramatsu Toshiro
Masataka Otani