PLASMA TREATING APPARATUS

Title:

PLASMA TREATING APPARATUS

Document Type and Number:

Japanese Patent JP2001267390

Kind Code:

A

Abstract:

To solve the problem that a conventional device where a plasma treatment chamber is provided along with a cleaning/drying treatment chamber has a complicated configuration, and is expensive since the conventional apparatus as an air conveyance robot for transferring to the cleaning/drying treatment chamber, a vacuum robot installed in the plasma treatment chamber, and an air conveyance robot installed in the cleaning drying treatment chamber.

A lock chamber is shared, and the air conveyance robot for transfer and the air conveyance robot installed in a washing/drying device are shared, thus providing a further compact and inexpensive treating device.

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Inventors:

MATSUDA SHINICHIRO
KUDO KATSUYOSHI
YOSHIOKA TAKESHI
TORII ZENZO

Application Number:

JP2000071120A

Publication Date:

September 28, 2001

Filing Date:

March 14, 2000

Export Citation:

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Assignee:

HITACHI LTD
HITACHI KASADO ENG CO LTD

International Classes:

H05H1/46; H01L21/302; H01L21/3065; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; H01L21/3065

Attorney, Agent or Firm:

Yukihiko Takada (1 outside)

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