Title:
PLASMA TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3124204
Kind Code:
B2
Abstract:
PURPOSE: To provide a plasma treatment apparatus which can moderate the deflection of plasma due to E×B drift and which can carry out treatment uniformly on the whole surface of a substrate.
CONSTITUTION: A first electrode 11 and a second electrode 12 facing each other and on which a wafer 13 is mounted are installed in a vacuum container 10. A gas supply system 22 to supply reactive gases and an evacuating system 23 to evacuate the container 10 are connected with the container 10. A high frequency power source 14 to form an electric field between the electrodes 11 and 12 is connected with the electrode 11. A circular magnetic system 30M to form a magnetic field B having a center face crossing the electric field E is installed in the circumference of the container 10. The magnetic system 30M is provided with a plurality of magnet elements having different magnetic directions one another in the center face of the magnetic field B. Electrons drift due to the power produced based on the product E×B wherein the E stands for the electric field and B for the magnetic field. The center face of the magnetic field B is so set as to shift to upper position than the surface to be treated and magnetic fluxes cross the surface to be treated.
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Inventors:
Itsuko Sakai
Makoto Sekine
Keiji Horioka
Yukimasa Yoshida
Goichiro Inazawa
Masahiro Ogasawara
Yoshio Ishikawa
Kazuo Eguchi
Makoto Sekine
Keiji Horioka
Yukimasa Yoshida
Goichiro Inazawa
Masahiro Ogasawara
Yoshio Ishikawa
Kazuo Eguchi
Application Number:
JP3411095A
Publication Date:
January 15, 2001
Filing Date:
February 22, 1995
Export Citation:
Assignee:
株式会社東芝
東京エレクトロン株式会社
東京エレクトロン山梨株式会社
東京エレクトロン株式会社
東京エレクトロン山梨株式会社
International Classes:
H05H1/46; C23C16/50; C23F4/00; H01J37/32; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H05H1/46; C23C16/50; C23F4/00; H01L21/205; H01L21/3065
Domestic Patent References:
| JP7201493A | ||||
| JP7197253A | ||||
| JP7197252A | ||||
| JP7169591A | ||||
| JP7197255A |
Attorney, Agent or Firm:
Takehiko Suzue