Title:
PLATINUM THIN-FILM ELEMENT
Document Type and Number:
Japanese Patent JP3924460
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve the problem that a platinum resistance bulb increases in size for higher resistance and easier use and its use as a temperature sensor is limited since, although the resistance value of the platinum resistance bulb is normally 100 or 500 Ω, resistance value variation per 1°C is small with the resistance value and measurement requiring high resolution, or a three-wire or four-wire type resistance measurement for avoiding an error due to lead wire resistance needs to be taken.
SOLUTION: Independent thin-film elements of the platinum resistance bulb are stuck with their film adhesion surfaces in and element resistances are connected together in series to obtain the total resistance value of the two elements. Consequently, the resistance can be made larger without varying the widths, depths, or thicknesses of the elements.
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Inventors:
Kenichiro Takenoya
Application Number:
JP2001379160A
Publication Date:
June 06, 2007
Filing Date:
December 12, 2001
Export Citation:
Assignee:
Tama Electric Industry Co., Ltd.
International Classes:
G01K7/18; H01L37/00; H01C7/00; H01C7/02; (IPC1-7): H01L37/00; G01K7/18; H01C7/02
Domestic Patent References:
| JP64065427A | ||||
| JP57148802U | ||||
| JP4043930A | ||||
| JP6500628A | ||||
| JP11289653A | ||||
| JP11326072A |