PURPOSE: To achieve high speed and high accuracy at the time of positioning for a certain aimed position by using estimated or measured disturbance to an operational part so as to perform compensation of feed-forward disturbance, and by integrating the deflection from the aimed position for the compensation of feed-back disturbance, at the same time.
CONSTITUTION: A positional signal of an operational part is compared with an aimed value by an operational control part 10, and is then turned into a speed signal by a differentiator 12, while the deflection between the measured pressures P1, P2 of an actuator air chamber and a reference pressure is input to amplifiers 13a, 13b, which is output as a drive command value of a control valve. A disturbance force compensator 11 is composed of a forward disturbance force compensator 21 comprising a disturbance force detection force 14 and a disturbance compensation force structure 15, while the positional deflection between the operational part and the aimed one is formed out of a a backward disturbance force compensator 22 comprising an integrator 16, an amplifier 17, and an adder 18, a weight part 19, and of a disturbance compensation command value adder, so as to compensate the outputs of the amplifiers 13a, 13b. The positioning for a certain aimed position can thus be performed at a high speed and with high accuracy.
UMEDA YOSHIO
TAKASO HIROSHI
TACHIKAWA MASAICHIRO
