To prevent a degradation of a resolution and a dynamic range on a polarization characteristic, that may occur in the case where a part of scattered light generated in a divisional optical path at the front of a final divisional optical path traces an identical optical path of diffraction light in the final divisional optical path in a multi-path type polarization device.
The divisional optical paths 10, 20 that output incident light beams to a diffraction grating 1 by making the light beams to be parallel light beams and output the returned light beams from the diffraction grating 1 through a slit provided therein, comprise respective collimators 2, 4 for making the incident light beams to be parallel light beams. The collimators 2, 4 of the respective divisional optical paths 10, 20 are provided in such a manner that radiation regions R1, R2 on the diffraction grating 1 of light beams L1, L3 output from the respective collimators 2, 4 of the corresponding divisional optical paths 10, 20 are deviated with each other in at least an extensional direction of a dark line.
KANEKO TSUTOMU
YAMAMOTO TOMOKAZU
| JP2001183233A | 2001-07-06 | |||
| JPH05149787A | 1993-06-15 | |||
| JP2001183233A | 2001-07-06 | |||
| JPH05149787A | 1993-06-15 |
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
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