To provide a polishing apparatus capable of preventing unneeded moment from being generated in a chuck and a retainer in polishing work and improving polishing precision to a disc-like workpiece for the polishing apparatus, which has the polishing head that has the chuck and the retainer supported so that they can move vertically freely and can be rocked freely to the head body, a chuck pressurizing means for pressurizing the chuck over the entire surface from an upper part, and a retainer pressurizing means for pressurizing the retainer over the entire surface from an upper part, and to provide the polishing head.
The polishing apparatus has the polishing head that supports the chuck independently of the retainer through a chuck support mechanism against the head body and supports the retainer independently of the chuck through a retainer support mechanism against the head body. The polishing head supports the chuck independently of the retainer through the chuck support mechanism against the head body, and supports the retainer independently of the chuck through the retainer support mechanism against the head body.
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TOKUNAGA HIROYUKI
TAKEDA HIDETOSHI
KOBIKI YASUHIRO
YAMADA RYOICHI
KOMATSU MFG CO LTD
Yoshiyuki Obata