Title:
POLISHING CARRIER AND POLISHING CARRIER MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2021167051
Kind Code:
A
Abstract:
To make it possible to prevent occurrence of scratch (scratch mark caused during polishing) on an outer peripheral surface of a disk-like object to be polished as an object to be polished, to obtain a carrier for holding the object to be polished which preferably comprises a metal and a resin, and to accurately and easily manufacture the carrier.SOLUTION: A carrier for holding an object to be polished comprises a sheet-like base material having a storage through-hole for the object to be polished, and a set of upper and lower synthetic resin sheets which are integrally provided on both surfaces of the sheet-like base material in a laminated state. The storage through-hole for the object to be polished is integrally provided with an annular buffer holding part for the object to be polished in which a resin buffer entity part, that is generated by curing a part of the synthetic resin sheet of a material having a hardness lower than the sheet-like base material after liquefying the same, is formed by processing means.SELECTED DRAWING: Figure 1
Inventors:
KAJIYAMA SHIGEKI
TABATA YOSUKE
TABATA YOSUKE
Application Number:
JP2020071452A
Publication Date:
October 21, 2021
Filing Date:
April 13, 2020
Export Citation:
Assignee:
SAGAMI PCI KK
International Classes:
B24B37/28; B26D5/30
Attorney, Agent or Firm:
Mitsuyasu Miura
Takayuki Kayahara
Takayuki Kayahara