Title:
POLISHING DEVICE AND POLISHING METHOD AND MANUFACTURING METHOD FOR OPTICAL PART
Document Type and Number:
Japanese Patent JP2003011058
Kind Code:
A
Abstract:
To provide a polishing device, a polishing method, and a manufacturing method for an optical part capable of improving machining efficiency much more than a conventional method.
This polishing device has a rotary shaft for rotating a polishing tool by itself, a revolving shaft for revolving the polishing tool, and a mobile mechanism for changing a revolving radius of the polishing tool.
Inventors:
YASUI KENGO
Application Number:
JP2001198144A
Publication Date:
January 15, 2003
Filing Date:
June 29, 2001
Export Citation:
Assignee:
NIKON CORP
International Classes:
B24B49/02; B24B13/00; B24B47/12; (IPC1-7): B24B49/02; B24B13/00; B24B47/12
Attorney, Agent or Firm:
Furuya
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