Title:
POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2009274211
Kind Code:
A
Abstract:
To provide a polishing device capable of controlling a pressure of a correcting tool applied to a polishing board without boring the tool.
The polishing device 20 comprises a polishing board 22 for polishing a workpiece, the disklike correcting tool 26 for correcting the surface shape of the polishing board 22, and a driving roller 60 for applying torque to an outer peripheral surface of the correcting tool 26 to rotate the tool 26. The device is equipped with a liquid reservoir 103 having an upper surface of the correcting tool 26 as a bottom. The pressure of the correcting tool 26 applied to the polishing board 22 is controlled by an amount of a liquid put in the reservoir 103.
Inventors:
KUROSAWA HIROSHI
Application Number:
JP2009196606A
Publication Date:
November 26, 2009
Filing Date:
August 27, 2009
Export Citation:
Assignee:
TOPCON CORP
International Classes:
B24B37/00; B24B49/16; B24B49/18; B24B53/017; B24B53/02
Domestic Patent References:
JPH10286755A | 1998-10-27 | |||
JPH07223162A | 1995-08-22 | |||
JPH0223951A | 1990-01-26 | |||
JPS55129764A | 1980-10-07 | |||
JP49141497A | ||||
JPH10315118A | 1998-12-02 | |||
JPS61102458A | 1986-05-21 | |||
JPS55138057A | 1980-10-28 | |||
JPH0475870A | 1992-03-10 |
Attorney, Agent or Firm:
Tamio Nishiwaki