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Title:
POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2009274211
Kind Code:
A
Abstract:

To provide a polishing device capable of controlling a pressure of a correcting tool applied to a polishing board without boring the tool.

The polishing device 20 comprises a polishing board 22 for polishing a workpiece, the disklike correcting tool 26 for correcting the surface shape of the polishing board 22, and a driving roller 60 for applying torque to an outer peripheral surface of the correcting tool 26 to rotate the tool 26. The device is equipped with a liquid reservoir 103 having an upper surface of the correcting tool 26 as a bottom. The pressure of the correcting tool 26 applied to the polishing board 22 is controlled by an amount of a liquid put in the reservoir 103.


Inventors:
KUROSAWA HIROSHI
Application Number:
JP2009196606A
Publication Date:
November 26, 2009
Filing Date:
August 27, 2009
Export Citation:
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Assignee:
TOPCON CORP
International Classes:
B24B37/00; B24B49/16; B24B49/18; B24B53/017; B24B53/02
Domestic Patent References:
JPH10286755A1998-10-27
JPH07223162A1995-08-22
JPH0223951A1990-01-26
JPS55129764A1980-10-07
JP49141497A
JPH10315118A1998-12-02
JPS61102458A1986-05-21
JPS55138057A1980-10-28
JPH0475870A1992-03-10
Attorney, Agent or Firm:
Tamio Nishiwaki



 
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