Title:
POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2017001164
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a polishing device enhanced in cleaning workability.SOLUTION: A polishing device includes: cover means (52) which covers a chuck table (20) and polishing means (32) and prevents scattering of powder dust generated in polishing; suction means which includes an exhaust duct (64) connected to an exhaust port (62) provided in the cover means from the outside of the cover means and a suction source (66) connected to the exhaust port via the exhaust duct, sucks air containing powder dust in the cover means during the polishing and discharges the air to the outside of the cover means; and a suction cleaning unit (70) which is detachably connected to the suction means and removes powder dust deposited in the cover means while the polishing is stopped. The suction cleaning unit includes: a flexible hose (72); a connection section (74) which is provided at one end of the flexible hose and is detachably connected to the exhaust port from the inside of the cover means; and a suction section (76) which is provided at the other end of the flexible hose and has an opening (76a) smaller than the exhaust port.SELECTED DRAWING: Figure 2
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Inventors:
DEGEN PEKIJA
Application Number:
JP2015120411A
Publication Date:
January 05, 2017
Filing Date:
June 15, 2015
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B55/06; B24B29/00; H01L21/304
Domestic Patent References:
| JP2004001118A | 2004-01-08 | |||
| JPS57109815U | 1982-07-07 | |||
| JP2003326459A | 2003-11-18 | |||
| JP2003245230A | 2003-09-02 | |||
| JPS58109446U | 1983-07-26 | |||
| JPH08323624A | 1996-12-10 | |||
| JP2000117632A | 2000-04-25 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto