Title:
研磨装置
Document Type and Number:
Japanese Patent JP4374794
Kind Code:
B2
More Like This:
JP2017126617 | LIQUID CHEMICAL SUPPLY DEVICE AND SUBSTRATE PROCESSING DEVICE |
WO/2002/053490 | METHOD OF MAKING OPTICAL FLUORIDE LASER CRYSTAL COMPONENTS |
JP4074126 | Polishing composition |
Inventors:
Masaru Kawada
Kaoru Sano
Kaoru Sano
Application Number:
JP2001094798A
Publication Date:
December 02, 2009
Filing Date:
March 29, 2001
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
B24B57/02; B24B13/00; B24B37/00
Domestic Patent References:
JP569286A | ||||
JP8323612A | ||||
JP62188672A |
Attorney, Agent or Firm:
Toshifumi Kita
Hiroyuki Eguchi
Hiroyuki Eguchi