Title:
研磨装置
Document Type and Number:
Japanese Patent JP5763979
Kind Code:
B2
More Like This:
Inventors:
Keiichi Miyakoshi
Fumiaki Saito
Fumiaki Saito
Application Number:
JP2011129838A
Publication Date:
August 12, 2015
Filing Date:
June 10, 2011
Export Citation:
Assignee:
Estring Co., Ltd.
International Classes:
B24B45/00; B24D13/04
Domestic Patent References:
JP2003191159A | ||||
JP3083815U | ||||
JP6238557A | ||||
JP2005153079A |
Attorney, Agent or Firm:
Tsuyoshi Yoshii
Masae Yoshii
Masae Yoshii