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Patent Searching and Data


Title:
POLISHING PAD AND POLISHING APPARATUS
Document Type and Number:
Japanese Patent JP2006339570
Kind Code:
A
Abstract:

To provide a polishing pad with which a stable polishing rate can be obtained and which is superior in inplane uniformity in the polishing pad used for forming a flat face in glass, semiconductor, dielectric/metal complex, an integrated circuit and the like and to provide a polishing apparatus.

In the polishing pad formed of at least a polishing layer and a cushion layer as a first means, micro rubber A hardness of the cushion layer is 50 to 95 and modulus of hysteresis loss at the time of 25% pushing is 10% to 32%. In the polishing pad formed of at least the polishing layer and the cushion layer as the second means, micro rubber A hardness of the cushion layer is 50 to 95, and tanδ of 100 Hz is 0.03 to 0.25. The polishing pad is installed on the polishing apparatus.


Inventors:
SUGIMURA MASAHIRO
ITO NOBUAKI
Application Number:
JP2005165282A
Publication Date:
December 14, 2006
Filing Date:
June 06, 2005
Export Citation:
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Assignee:
TORAY INDUSTRIES
International Classes:
H01L21/304; B24B37/20