Title:
POLISHING SHEET AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2009000761
Kind Code:
A
Abstract:
To provide a polishing sheet requiring a short period of time for rising up; to provide a manufacturing method of the polishing sheet.
The polishing sheet made of a sheet-shaped foam element is characterized by its surface finished by carrying out buffing operations with abrasive having grain sizes of No.60-200 (60-200 meshes) as the final finishing.
Inventors:
YOSHIDA SHIGEYUKI
HONDA TOMOYUKI
SUGIMURA MASAHIRO
HONDA TOMOYUKI
SUGIMURA MASAHIRO
Application Number:
JP2007162375A
Publication Date:
January 08, 2009
Filing Date:
June 20, 2007
Export Citation:
Assignee:
NEC ELECTRONICS CORP
TORAY INDUSTRIES
TORAY INDUSTRIES
International Classes:
B24B37/00; B24B29/02; B24B37/20; B24B37/24; H01L21/304
Attorney, Agent or Firm:
Shinichi Ogawa
Takashi Noguchi
Kazuhiko Saishita
Takashi Noguchi
Kazuhiko Saishita