Title:
POSITION ADJUSTING MECHANISM FOR FIXING LOAD PORT
Document Type and Number:
Japanese Patent JP3529320
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To adjust the position between a load port and a semiconductor manufacturing apparatus easily when installing the load port in the semiconductor manufacturing apparatus.
SOLUTION: Positioning members 41, 42 and movable members 53, 57 which abut on them are disposed in one and the other of the load port 1 and the semiconductor manufacturing apparatus respectively. Two sets of such a positioning member and movable member are provided, and a groove where the movable member material fits in the face abutting on the movable member of one positioning member is provided. In addition, mechanisms 31, 32 that can adjust a position by moving the movable member in the vertical direction are provided, which allows adjusting the position between the semiconductor manufacturing apparatus and the load port by adjusting the position of the movable member. Preferably the positioning member are to be circular rollers that can rotate about their axes.
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Inventors:
Igarashi, Hiroshi
Miyajima, Toshihiko
Okabe, Tsutomu
Miyajima, Toshihiko
Okabe, Tsutomu
Application Number:
JP2000097969A
Publication Date:
May 24, 2004
Filing Date:
March 31, 2000
Export Citation:
Assignee:
TDK CORP
International Classes:
H01L21/677; B65G49/00; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B65G49/00
Attorney, Agent or Firm:
岡部 正夫 （外１０名）