Title:
POSITION DETECTOR
Document Type and Number:
Japanese Patent JPS646811
Kind Code:
A
Abstract:
PURPOSE:To perform accurate position detection by arranging a measuring means which measures the relative position of a holding member in its moving direction at a specific position. CONSTITUTION:An objective 10 is positioned above the center position C of the objective holding member 8 at a distance ly in a (y) direction. Then a photoreflector main body 28 and a photoreflector reflecting plate 32 are arranged above the center position C of the objective holding member 8 at the distance ly in the (y) direction. Further, the photoreflector reflecting plate 32 is positioned at a distance lx from the center position C of the objective holding member 8 in an (x) direction. If rolling occurs at the time of driving the objective holding member 8, an objective 10 shifts in (x)-directional position by a specific distance, but the photoreflector reflecting plate 32 also moves in the same (x) direction by the same distance, so the (x)-directional position of the objective 10 is accurately detected.
Inventors:
IMAI YASUAKI
Application Number:
JP16258487A
Publication Date:
January 11, 1989
Filing Date:
June 30, 1987
Export Citation:
Assignee:
CANON DENSHI KK
International Classes:
G01B11/00; G01B21/00; G11B7/085; G11B7/09; (IPC1-7): G01B11/00; G01B21/00; G11B7/085; G11B7/09
Attorney, Agent or Firm:
Yamashita
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