To generate large induced power by using a specific coil pattern for an excitation coil and a detection coil and increase the SN ratio of an output signal.
The electromagnetic induction type rotary encoder 1 includes an excitation substrate 5 including the excitation coil 4, a detection substrate 8 which is fixed to a movable body facing the excitation substrate 5 and includes the detection coil 7 which is arranged facing the excitation coil 4 through a gap, and a controller 9 which outputs an excitation signal to the excitation coil 4 and processes a detection signal from the detection coil 7. The controller 9 includes an excitation circuit 21 and a high-frequency generation circuit 22 for exciting the excitation coil 4 with a high-frequency wave, a demodulation circuit 23 for demodulating a signal from the detection coil 7 in accordance with the excitation to the excitation coil 4, a waveform shaping circuit 24 for performing waveform shaping on a signal from the demodulation circuit 23, and a pulse generation circuit 25 for outputting a pulse signal on the basis of a signal from the waveform shaping circuit 24. The excitation coil 4 and the detection coil 7 are formed into a meandering coil pattern.
JPH03238315A | 1991-10-24 | |||
JPH01124706A | 1989-05-17 | |||
JPS6433021U | 1989-03-01 |
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