To stably perform positioning in a microscopic unit at high speed in a short time by an easy method by driving/controlling a moving means so as to move a worktable or a work means by a moving error quantity between a preset moving distance and an actual moving distance at which the worktable or the work means actually moves.

An actual moving distance being a real moving distance is detected on the basis of a position of a table 1 detected by a position detector 9, and is stored as this actual moving distance feedback quantity. It is compared with a feedback quantity, and when a difference between a moving distance and the feedback quantity becomes less than 1, operation is switched to a control system of a 0.017μ system. A piezoelectric element incorporated into a driving ring 5 is operated against energizing force of a ring-shaped spring by driving the driving ring 5, and a space between the driving ring 5 and the table 1 is expanded, and the table 1 is fed in slight movement. An excess and deficiency caused by rough positioning by a servomotor 2 is eliminated by this slight movement feed.