Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POSITIVE TYPE PHOTORESIST COMPOSITION
Document Type and Number:
Japanese Patent JPH0545870
Kind Code:
A
Abstract:

PURPOSE: To provide a positive type photoresist compsn. having high sensitivity without decrease in the resist performance under conditions of prebaking, and high hallation preventing effect, with which a resist pattern of high resolution can be formed.

CONSTITUTION: This resist compsn. contains an alkali-soluble resin, a compd. containing a 1,2-naphthoquinone diazide group, and at least one light-absorbing agent selected from formulae I-III by 0.1-10wt.% of the total solid content. In formulae, R1 and R2 are hydrogen atom, halogen atom, alkyl group, or alkoxy group, R3 is hydrogen atom or alkyl group, R4 is hydrogen atom, halogen atom, alkyl group, alkoxy group, hydroxyl group or nitro group, X is single bond or -C(=Q)-, l is 1 or 2, (m) is 3 or 4, and (n) is 2 or 3.


Inventors:
KAWABE YASUMASA
KOKUBO TADAYOSHI
Application Number:
JP23075891A
Publication Date:
February 26, 1993
Filing Date:
August 19, 1991
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
G03F7/004; G03F7/022; H01L21/027; (IPC1-7): G03F7/004; G03F7/022; H01L21/027