Title:
ポジ型感光性樹脂組成物およびその硬化物
Document Type and Number:
Japanese Patent JP4296792
Kind Code:
B2
Inventors:
Katsumi Inomata
Atsushi Ito
Kenichi Yokoyama
Shinichiro Iwanaga
Atsushi Ito
Kenichi Yokoyama
Shinichiro Iwanaga
Application Number:
JP2003028857A
Publication Date:
July 15, 2009
Filing Date:
February 05, 2003
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/023; C08F297/04; G03F7/004; H01L21/027; H01L21/312
Domestic Patent References:
| JP10153854A | ||||
| JP7168359A | ||||
| JP6043637A | ||||
| JP2001240757A |
Attorney, Agent or Firm:
Shunichiro Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki
Koji Makimura
Chihata Takahata
Toru Suzuki