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Patent Searching and Data


Title:
POWER CIRCUIT OF ION SOURCE PART
Document Type and Number:
Japanese Patent JPH09139187
Kind Code:
A
Abstract:

To provide a power circuit capable of switching over at a low voltage.

This power circuit is provided with a main power source 42 for electronic impact for applying an electron impact voltage in addition to a voltage due to an ionization power source 40 when degassing is performed by means of an electronic impact method. In addition, this main power source 42 for electronic impact is serially connected to the ionization power source 40. The circuit is also provided with a rectifying circuit 44 in which emission current is conductive. The rectifying circuit 44 is provided by directly connecting a secondary coil 50 and a diode 52 between a first terminal 46 and a second terminal 48. A smoothing capacitor 54 is provided between the first terminal 46 and the second terminal 48.


Inventors:
SUGIYAMA MASAYUKI
TAKANO DAISAKU
Application Number:
JP29526895A
Publication Date:
May 27, 1997
Filing Date:
November 14, 1995
Export Citation:
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Assignee:
ANELVA CORP
International Classes:
G01N27/62; H01J49/10; H02J1/00; (IPC1-7): H01J49/10; G01N27/62; H02J1/00
Attorney, Agent or Firm:
Takashi Ogaki