Title:
強力マイクロ波プラズマ発生装置
Document Type and Number:
Japanese Patent JP3571056
Kind Code:
B2
Abstract:
In a device for the production of powerful microwave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.
Inventors:
Spitzl, Ralph
Usherman, Benedict
Usherman, Benedict
Application Number:
JP53146697A
Publication Date:
September 29, 2004
Filing Date:
March 03, 1997
Export Citation:
Assignee:
Spitzl, Ralph
International Classes:
H01J37/32; H01L21/302; H01L21/3065; H05H1/46; (IPC1-7): H05H1/46; H01J37/32; H01L21/3065
Domestic Patent References:
| JP1187824A | ||||
| JP5345982A |
Foreign References:
| EP0564359A1 | ||||
| US3577207 | ||||
| EP0398832A1 |
Attorney, Agent or Firm:
Hiroyuki Ikeuchi