Title:
PRECURSOR COMPOSITION, METHOD FOR DELIVERING PRECURSOR COMPOSITION, AND METHOD FOR FORMING LEAD ZIRCONATE TITANATE (PZT) FILM
Document Type and Number:
Japanese Patent JP2013177697
Kind Code:
A
Abstract:
To provide a lead zirconate titanate (PZT) material having unique properties and applicability to a PZT thin film capacitor, for example, a ferroelectric capacitor structure such as FeRAMs.
A PZT material is scalable, that is, being dimensionally scalable, pulse length scalable and/or E-field scalable in character, and is useful for ferroelectric capacitors over a wide range of thicknesses, for example, from about 20 nanometers to about 150 nanometers, and a range of lateral dimensions extending to as low as 0.15 μm. The scalable PZT material may be formed by liquid delivery MOCVD without PZT film modification techniques such as a material acceptor dopant such as Nb, Ta, La, Sr, and Ca or film modifiers.
Inventors:
VAN BUSKIRK PETER C
ROEDER JEFFREY F
BILODEAU STEVEN M
RUSSELL MICHAEL W
JOHNSTON STEPHEN T
VESTYCK DANIEL J
BAUM THOMAS H
ROEDER JEFFREY F
BILODEAU STEVEN M
RUSSELL MICHAEL W
JOHNSTON STEPHEN T
VESTYCK DANIEL J
BAUM THOMAS H
Application Number:
JP2013125830A
Publication Date:
September 09, 2013
Filing Date:
June 14, 2013
Export Citation:
Assignee:
ADVANCED TECH MATERIALS
International Classes:
C23C16/40; C04B35/491; H01B3/00; H01B3/12; H01G4/12; H01G4/33; H01L21/316; H01L21/3205; H01L21/768; H01L21/8242; H01L21/8246; H01L23/52; H01L23/522; H01L27/105; H01L27/115; H01L21/314
Attorney, Agent or Firm:
Yoshiyuki Inaba
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