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Patent Searching and Data


Title:
PREPARATION OF COLLOIDAL SILICA-CONTAINING ABRASION SOLUTION
Document Type and Number:
Japanese Patent JPH08319111
Kind Code:
A
Abstract:

PURPOSE: To prevent occurrence of an abrasion mark and deterioration of an abraded face by adding glycerol to a colloidal silica-containing abrasion solution and to reduce retention of the colloidal silica to a tool to be brought into contact with the abrasion solution by adding glycerol to the abrasion solution.

CONSTITUTION: An abrasion solution containing colloidal silica, having pH3 to pH11 is mixed with 5-40wt.%, based on the content of the colloidal silica, of glycerol. Consequently, flocculation of the colloidal silica and variability of particle diameters can be prevented even in abrasion in the atmosphere to improve accuracy of an abraded face and to prevent occurrence of an abrasion mark.


Inventors:
KARASAWA YOSHIO
ABE TADASHI
Application Number:
JP14526795A
Publication Date:
December 03, 1996
Filing Date:
May 19, 1995
Export Citation:
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Assignee:
O P C KK
SUMIKIN SEKIEI KK
International Classes:
B24C1/08; B24B37/00; C01B33/141; H01L21/304; (IPC1-7): C01B33/141; B24B37/00; B24C1/08; H01L21/304