Title:
PRESSURE BULKHEAD AND X-RAY EXPOSING DEVICE USING IT
Document Type and Number:
Japanese Patent JP3854680
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an X-ray output window having a sufficient mechanical strength and thin.
SOLUTION: The thickness of the beryllium foil 11 of an X-ray output window E1 for taking out an X-ray from a beam duct 2 to an exposing chamber 1 is designed on the basis of the tensile stress generated in the center of the beryllium foil 11 when deflected by the pressure difference between the beam duct 2 and the exposing chamber 1. In order to prevent a larger tensile stress from being generated in the contact part of a flange 12 with the beryllium foil 11, a curved part 12a having a large curvature radius is provided on the inner periphery of the flange 12.
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Inventors:
Takayuki Hasegawa
Eiji Sakamoto
Eiji Sakamoto
Application Number:
JP5842297A
Publication Date:
December 06, 2006
Filing Date:
February 26, 1997
Export Citation:
Assignee:
Canon Inc
International Classes:
G21K5/00; G03F7/20; H01L21/027; H05H13/04; (IPC1-7): G21K5/00; G03F7/20; H01L21/027; H05H13/04
Domestic Patent References:
| JP4085700U | ||||
| JP3108699A | ||||
| JP2115799A |
Attorney, Agent or Firm:
Yoshiro Sakamoto