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Patent Searching and Data


Title:
PRESSURE MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH10213509
Kind Code:
A
Abstract:

To provide a pressure measuring device capable of measuring a wide pressure range without combining a vacuum gauge.

When vacuum atmosphere pressure is to be measured by using a vacuum gauge V including a filament F, grid G and a collector C, an upper limit value Ifmax is provided on a filament current If and, in a low pressure range, pressure from an ionic current Ii flowing to the collector C is found by limiting the filament current If by the action of the ionization vacuum gauge so that an emission current Ie may be constant. In a high pressure range, temperature of the filament F is lowered from the low pressure range, Pirani vacuum gauge actuated, and pressure is found from the quantity of heat of the filament F deprived of by gas molecule. In high pressure range, the filament current If can be controlled to the constant current of the upper limit value Ifmax.


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Inventors:
KAKU AKIRA
NAKAMURA SHIZUO
Application Number:
JP2720097A
Publication Date:
August 11, 1998
Filing Date:
January 27, 1997
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01L21/30; (IPC1-7): G01L21/30
Attorney, Agent or Firm:
Shigeo Ishijima (1 outside)