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Title:
PRESSURE SENSOR CHARACTERISTIC MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH10213502
Kind Code:
A
Abstract:

To provide a pressure sensor characteristic measuring device capable of restraining generation of mechanical stress and achieving highly accurate characteristic measurement.

This pressure sensor characteristic measuring device, which includes a pressure sensor body 1, a pressure induction tube 17 for inducing pressure to a diaphragm inside the pressure sensor body 1, and an external terminal 18 for fetching electrical signals outputted correspondingly to the deflection of the diaphragm to the exterior and which also includes a hollow part 51, pressure impression jig 5 including a plural number of openings 52 in which the pressure induction tube 17 is inserted, and a wiring substrate 4 provided with an electrode pin 41 for connecting it to the external terminal 18 and fetching the electrode, induces pressure to the diaphragm from the hollow part 51 through the pressure induction tube 17 by inserting the pressure induction tube 17 of the pressure sensor into the opining 52 on the pressure impression jig 5 so as to make the external terminal 18 of the pressure sensor to come in contact with the electrode pin 41 on the wiring substrate 4 and restraining it, by which electrical signals produced correspondingly to the deflection of the diaphragm generated by the induced pressure are fetched through the electrode pin 41 and the external terminal 18.


Inventors:
YAMAMOTO HARUHIKO
Application Number:
JP1799997A
Publication Date:
August 11, 1998
Filing Date:
January 31, 1997
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01L9/04; G01L9/00; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Attorney, Agent or Firm:
Shigeji Sato (1 person outside)



 
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