To provide a pressure regulating valve allowing heating of a valve element, facilitating replacement of the valve element and a valve element heating means, and minimizing thickness of a valve part comprising the valve element, a valve element holder, or the like in regard to a pressure regulating valve provided in an exhaust side of a vacuum treatment chamber in a vacuum treatment device.
The pressure regulating valve provided in the exhaust side of the vacuum treatment chamber in the vacuum treatment device is characterized by that the valve element attached with the valve element heating means is detachably attached to the valve element holder, and tabular connecting terminals positioned on opposing faces of the valve element and the valve element holder in parallel with the opposing faces are respectively provided on the valve element and the valve element holder.