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Patent Searching and Data


Title:
PRESSURE REGULATING VALVE
Document Type and Number:
Japanese Patent JP2010112388
Kind Code:
A
Abstract:

To provide a pressure regulating valve allowing heating of a valve element, facilitating replacement of the valve element and a valve element heating means, and minimizing thickness of a valve part comprising the valve element, a valve element holder, or the like in regard to a pressure regulating valve provided in an exhaust side of a vacuum treatment chamber in a vacuum treatment device.

The pressure regulating valve provided in the exhaust side of the vacuum treatment chamber in the vacuum treatment device is characterized by that the valve element attached with the valve element heating means is detachably attached to the valve element holder, and tabular connecting terminals positioned on opposing faces of the valve element and the valve element holder in parallel with the opposing faces are respectively provided on the valve element and the valve element holder.


Inventors:
SAITO KENJI
Application Number:
JP2008282705A
Publication Date:
May 20, 2010
Filing Date:
November 04, 2008
Export Citation:
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Assignee:
EAGLE IND CO LTD
International Classes:
F16K49/00; F16K1/22; F16K3/18; F16K51/02
Attorney, Agent or Firm:
Yoshihiro Sakurai