Pressure sensitivity type sensor - National University Corporation Tokyo University

Title:

Pressure sensitivity type sensor

Document Type and Number:

Japanese Patent JP6021110

Kind Code:

B2

Abstract:

The present invention achieves a pressure-sensitive sensor which can detect information on a pressure, a sound pressure, acceleration, gas and the like, with high sensitivity. The pressure-sensitive sensor includes: a cantilever (22); a frame (23) which is provided around the cantilever (22) and holds a base end of the cantilever (22); a gap (24) formed between the cantilever (22) and the frame (23); and a liquid (28) which seals the gap (24).

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Inventors:

Isao Shimoyama
Kiyoshi Matsumoto
Nguyen Bin Kiem
Nguyen Min June
Fan han phon

Application Number:

JP2013115612A

Publication Date:

November 02, 2016

Filing Date:

May 31, 2013

Export Citation:

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Assignee:

National University Corporation Tokyo University

International Classes:

G01L19/00; B81B3/00; G01L5/00; G01L9/00; G01L19/04; G01L19/06; G01N7/04; H01L29/84; H04R1/44

Domestic Patent References:

JP5862997B2

Attorney, Agent or Firm:

Masayoshi Yoshida
Hiromitsu Imaeda
Umemura Hiroaki

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