Title:
PRESSURE SENSOR ELEMENT AND PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2023055532
Kind Code:
A
Abstract:
To decrease zero-point shift of sensor output that is brought about by a substance accumulated on a diaphragm, while ensuring responsiveness to fluctuations in a pressure.SOLUTION: A pressure sensor element comprises: a diaphragm 2A that is deformed by a difference between a pressure applied to a pressure receiving surface 2Aa and a pressure applied to a measurement surface 2Ab; a particle layer 10 that is disposed on the pressure receiving surface 2Aa and formed of an aggregate of a plurality of particles 10a; and a sensor electrode unit 4 that is disposed on the measurement surface 2Ab and electrically detects the deformation of the diaphragm 2A. The particles 10a have a spherical shape. The adjacent particles 10a, and the particle layer 10 (particles 10a in the undermost layer) and the diaphragm 2A are adhered to each other not by strong bond such as ionic bond and covalent bond, but by point contact with relatively weak force such as force generated by static electricity, Van der Waals force, and intermolecular force.SELECTED DRAWING: Figure 2
Inventors:
SOEDA SUSUMU
ISHIHARA TAKUYA
SEKINE MASASHI
MATSUGI YASUAKI
NIIMURA YUSUKE
ISHIHARA TAKUYA
SEKINE MASASHI
MATSUGI YASUAKI
NIIMURA YUSUKE
Application Number:
JP2021164987A
Publication Date:
April 18, 2023
Filing Date:
October 06, 2021
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01L19/06; G01L9/12
Attorney, Agent or Firm:
Shigeki Yamakawa