Title:
PRESSURE SENSOR AND METHOD OF MANUFACTURING PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP2020012696
Kind Code:
A
Abstract:
To provide a pressure sensor capable of reducing wet spread on a glass layer, and a method of manufacturing a pressure sensor capable of reducing wet spread on a glass layer.SOLUTION: A diaphragm part 144 has a groove 146 that opens on surface 144a of diaphragm part 144 and has an annular groove 146 in a plan view surrounding the outer circumference 150f of a pressure sensing element 150 at a position spaced from the outer circumference 150f of the pressure sensing element 150. A glass layer 160 has a configuration that is in contact with at least part of an annular corner 146d that is the boundary between the surface 144a of the diaphragm part 144 and the inner surface 146b of the groove 146 without positioning outside the outer surface 146f of the groove 146.SELECTED DRAWING: Figure 5
Inventors:
OHORI HIROKAZU
HIRANO SATOSHI
OTANI TAKAYUKI
TAKAGI MASARU
MATSUOKA TOSHIYUKI
HIRANO SATOSHI
OTANI TAKAYUKI
TAKAGI MASARU
MATSUOKA TOSHIYUKI
Application Number:
JP2018134191A
Publication Date:
January 23, 2020
Filing Date:
July 17, 2018
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
G01L7/08; G01L23/22; H01L29/84
Attorney, Agent or Firm:
Cosmos International Patent and Trademark Office